
Medtech cleanroom

Advanced micro and nanofabrication
Our medtech cleanroom is a 400 m2 ISO 7 micro and nanofabrication facility with a wide range of fabrication and characterization equipment to enable research and development in wearable and implantable neurotechnologies.
The facilities include laser micromachining for diverse materials processing and a nanomaterials lab. For device packaging and hybridization, there is a suite of backend equipment available for wirebonding, ‘pick and place’, physical testing, ageing and sterilization. Cleanroom staff design and optimize innovative process flows.
Visit our virtual cleanroom

The facility includes state-of-the-art equipment for:
- Photolithography with mask and maskless aligners and semi-automated coater and developer units
- Deposition with co-focal sputtering
- Plasma etching for thin metal films (Pt, Ti), oxides, silicium, plastics and silicone and microwave and RF strippers
- Advanced microscopy with a Hitachi variable pressure Scanning Electron Microscope (SEM) for conductive, non-conductive and biological specimens and conventional Nikon microscopes
- Metrology with an optical and a mechanical profiler
- Laser cutting with high definition Optec femtosecond laser equipment
- A dedicated area for silicon / PDMS process with appropriate equipment




Team

